A new approach for rules-based optical proximity correction is presented.The discussion addresses on how to select and construct more concise and practical rules-base as well as how to apply that rules-base.Based on those ideas,several primary rules are suggested.The v-support vector regression method is used to generate a mathematical expression according to rule data.It enables to make correction according to any given rules parameters.Experimental results demonstrate applying rules calculated from the expression match well with that from the rule table.
