The effects of laser wavelengths(1064,532,355 and 266 nm)on nano-processing of fabricating a groove structure on(Ti,Al,Si)N alloy film using the micro-fiber near-field enhanced irradiation are investigated.It is observed that variations of laser wavelength can effectively change the widths of the groove structures,which are featured as one-dimension bowl-like structures.The minimum of the groove width can be achieved at 293 nm with a 532 nm laser inducing.In order to fabricate the groove in nanoscale,enough energy is delivered onto(Ti,Al,Si)N surface by a single laser pulse.Simulation results are also discussed to understand the experimental results.
