Deformation behaviors of Ti-6.5Al-3.5Mo-1.5Zr-0.3Si alloys with α/β lamellar structure were investigated systematically at different temperatures from room temperature to 950 ~C and different strain rates. Results reveal that when the deformation temperature is higher than a critical temperature of 600℃, an evident transition of deformation behavior from localized shear banding to α/β lamella kinking, flow softening and temperature/strain rate-dependent peak flow stress occurred in the alloy. The critical conditions for the occurrence of internal cracking and strain localization behavior associated with temperature and strain rate were determined.